國立清華大學「微感測器與致動器產學聯盟」活動公告

l  時間：09/27/2024 (星期五) 下午 14:00-16:00

l  地點：國立清華大學動力機械工程學系 工程一館 108 室

l   宗旨

2013 年多位在微感測器與致動器領域有豐富經驗的清大教授，在國科會的支持下推動「微感測器與致動器產學聯盟」(Micro Sensors and Actuators Technology Consortium, mSAT)，希望透過整合學界與國家實驗室的資源和經驗，協助業界解決相關技術問題、提供設備的支援、技術的轉移、及人才的培育。

l   演講內容 (Abstract)

Sumitomo Precision Products Co., Ltd. (SPP) is a leading provider of precision technologies and manufacturing services. Its core business capabilities include a full line of MEMS-related offerings: manufacturing equipment, process development, foundry production, test and manufacturing. MEMS Infinity was launched in September 2023 as a new organization that will take over the MEMS foundry service business previously conducted by SPP affiliate Silicon Sensing Systems Ltd.

Our capabilities extend from MEMS concept review and concept design through pilot and mass production of high-precision, highly reliable MEMS devices for even the most demanding applications. With world-class process technology and state-of-the-art tools in a 20,000 square-foot cleanroom, MEMS Infinity offers a 150mm and 200mm wafer foundry that meets growing customer demand for the burgeoning MEMS market.

Based on our proven high-volume production technology of PZT film deposition for gyroscopes, we offer seamless services from film deposition to device processing--all tailored to your needs. You get access to DRIE that is already proven for mass production of MEMS devices. We provide high-quality processing with world-class high selectivity and high etching rates while maintaining verticality, minimal sidewall roughness, and minimal CD loss.

Our services are available worldwide, and we are looking for customers in Taiwan as well.

l   講員簡介 (Speaker Bio)

Dr. Hiroshi Miyajima (miyajima-h@spp.co.jp) received the M.S. and Ph.D. degrees in precision machinery engineering, from the University of Tokyo, Tokyo, Japan, in 1987 and 2004, respectively.

He joined Olympus Corporation, Tokyo, Japan, in 1987, Goertek Technology Japan, Tokyo, Japan in 2018, and Sumitomo Precision Products Co., Ltd., Hyogo, Japan in 2021. His current position is Fellow, ICT Division, Sumitomo Precision Products. He was a Visiting Research Scholar at Case Western Reserve University, Cleveland, OH, USA from 1992 and 1994. He served as the general Co-Chair of IEEE Conference on Optical MEMS 2005 (Oulu, Finland), and Technical Program Committee member of IEEE MEMS in 2003, 2023 and 2024. He had been engaged primarily in development of optical MEMS devices and currently supporting business development in MEMS Infinity, Sumitomo Precision Products.

l  參加對象：對微系統領域有興趣之業界及學研界人士

l  名    額：由於座位有限，名額僅 100 人

             請於 2024/9/25 前上網報名 http://goo.gl/forms/yfaIfF44UY

l  費    用：一律免費

l  聯絡方式：林金慧 小姐  國立清華大學動機系 
             Email: ch.lin@mx.nthu.edu.tw  電話: (03) 574-2494

             方維倫 講座教授  國立清華大學動機系

             Email: fang@pme.nthu.edu.tw  電話: (03) 574-2923

             李昇憲 講座教授  國立清華大學奈微所 

             Email: ssli@mx.nthu.edu.tw    電話: (03) 516-2401

主辦單位：國立清華大學「微感測器與致動器產學聯盟」 (網址： http://www.usat.org.tw/)

SEMI Taiwan (網址：http://www.semi.org/ch/)

協辦單位：國立清華大學動機系、國立清華大學奈微所、國立清華大學工學院產學研合作聯盟