國立清華大學「微感測器與致動器產學聯盟」活動公告
l 時間：05/24/2023 (星期三) 下午 14:00-15:30
l 地點：國立清華大學動力機械工程學系 工程一館 106 室
l 宗旨
2013 年多位在微機電領域有豐富經驗的清大教授，於科技部的支持下成立「微感測器與致動器產學聯盟」(Micro Sensors and Actuators Technology Consortium, mSAT)。多年來聯盟透過整合學研界的資源和經驗，協助業界解決技術問題、提供設備支援、及技轉和人才培育等，也陸續邀請數十位國內外微系統專家學者，舉辦專題演講。今年因為疫情趨緩，聯盟準備開始舉辦活動，促進國內產學研界的交流，歡迎參加。
也歡迎國內微系統業者，踴躍加入本聯盟，一起努力提升我國技術水準與國際競爭力。
l 演講內容
Scandium Aluminium Nitride (ScAlN) is a promising piezoelectric material with outstanding features such as CMOS BEOL compatible, low loss at high frequency, as well as customizable coupling coefficient with varying scandium concentrations. In this talk, I will present the ScAlN thin film and MEMS platforms developed at IME. Various devices and applications will be show cased. Furthermore, I will share about the Lab-in-Fab which is a joint initiative by IME, STMicroelectronics and Ulvac aiming to offer a direct path from piezoelectric MEMS concepts to volume production. (中文演講)
l 講員簡介
Dr. Zhu Yao is the Head of MEMS department in Institute of Microelectronics (IME), A*STAR Singapore. Her current research interests include MEMS devices for sensing, actuating and communication applications. Zhu Yao received her Ph.D. degree from Nanyang Technological University in 2015. She is actively involved in IEEE societies such as associate editor for IEEE MEMS Journal, committee member of IEEE Solid State Circuit Society Singapore Chapter & IEEE Nanotechnology Technical Council, technical sub-committee member of IEEE IEDM 2023 and IEEE MEMS 2023. She is the recipient of SEMI MEMS & Sensors Industry Group Emerging Leaders Awards 2022.
時間
項目
講員
13:30-14:00
報到
14:00-15:00
ScAlN MEMS for Sensing and Frequency Control
Dr. Zhu Yao
(IME, A*STAR, Singapore)
15:00-15:30
Tea Break and Networking
l 參加對象：對微系統領域有興趣之業界及學研界人士
l 名 額：由於座位有限，名額僅 100 人
請於 2023年5月22日 前上網報名 http://goo.gl/forms/yfaIfF44UY
l 費 用：一律免費
l 聯絡方式：林金慧 小姐 國立清華大學動機系
Email: ch.lin@mx.nthu.edu.tw 電話: (03) 574-2494
方維倫 講座教授 國立清華大學動機系
Email: fang@pme.nthu.edu.tw 電話: (03) 574-2923
主辦單位：國立清華大學「微感測器與致動器產學聯盟」 (網址： http://www.usat.org.tw/)
SEMI Taiwan (網址：http://www.semi.org/ch/)
協辦單位：國立清華大學動機系、國立清華大學奈微所、國立清華大學工學院產學研合作聯盟
